Impact of boundary conditions and geometric tolerances dynamics on MEMS double touch mode capacitance pressure sensor applying M-shaped silicon design
Shabana S, Sumit Kumar Jindal · 2026
Read Impact of boundary conditions and geometric tolerances dynamics on MEMS double touch mode capacitance pressure sensor applying M-shaped silicon design by Shabana S, Sumit Kumar Jindal (2026) in the Tower of Babel, a free online library of public-domain works preserved in clean, searchable text. No sign-up. The full text is served as a plain-text file at a predictable URL, where text is present: https://antarctic-labs.com/tower-of-babel/PMC13574761.txt.
Description
Shabana S and Sumit Kumar Jindal present a 2026 design study for a micro pressure sensor that touches down twice as pressure climbs. Such MEMS sensors, tiny devices on silicon, serve medicine, cars, and aircraft. A touch design gains sensitivity and straight-line response when the moving diaphragm lands on the base in stages.
The design pairs a round flexible diaphragm with an M-shaped silicon base, which widens the contact zone. Small-bend theory models the diaphragm so the output stays near linear. Math formulas for capacitance and for both kinds of sensitivity were derived and run in MATLAB, while a physics package checked the bending shape. The notch size, which sets where touch begins, proved key to sensitivity. The authors pitch the sensor for cutting-edge sensing roles that need accuracy and durability in a small die.
Catalog record
| CREATOR | Shabana S, Sumit Kumar Jindal |
|---|---|
| YEAR | 2026 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 30855 |
| LICENSE | https://creativecommons.org/licenses/by/4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |