Ultra-Fast Response ALTP Thermal Gas Flow Sensor Based on Si3N4/AlN Composite Insulating Structure
Guo Chen, Xi Chen, Ziwen Jin, Hongbo Tian, Ruipeng Zhao, Bowan Tao · 2026
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Description
Guo Chen and co-authors built a fast gas flow sensor in 2026. The sensor uses a heat based design called an atomic layer thermopile. Such sensors react fast, but a slow heat path between layers held this one back. The team made the insulation layer much thinner by stacking two ceramic films.
The thinner stack kept sound insulation while letting heat pass far more quickly. Response time fell to a small fraction of a millisecond. Tests with several gases gave clean and steady signals, each with its own level of response. The design suits tasks that need to track rapid changes in gas flow.
Catalog record
| CREATOR | Guo Chen, Xi Chen, Ziwen Jin, Hongbo Tian, Ruipeng Zhao, Bowan Tao |
|---|---|
| YEAR | 2026 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 14 KB |
| VERSION | 1.0 |
| LICENSE | CC BY 4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |