Conformal SiNx Coating on Carbon Nanotubes via Transient UV–Ozone Functionalization and Two-Step Atomic Layer Deposition
Young Woo Kang, Haneul Kim, Inseo Lee, Yongkyung Kim, In-Sung Park, Jinho Ahn · 2026
Read Conformal SiNx Coating on Carbon Nanotubes via Transient UV–Ozone Functionalization and Two-Step Atomic Layer Deposition by Young Woo Kang, Haneul Kim, Inseo Lee, Yongkyung Kim, In-Sung Park, Jinho Ahn (2026) in the Tower of Babel, a free online library of public-domain works preserved in clean, searchable text. No sign-up. The full text is served as a plain-text file at a predictable URL, where text is present: https://antarctic-labs.com/tower-of-babel/pmc-13208833.txt.
Description
Young Woo Kang and five colleagues coat carbon nanotubes in silicon nitride without breaking their web, in a study published in two thousand twenty-six. Atomic layer deposition coats conformally, but nanotubes offer few chemical hooks for the first layer. Surface preparation decides success.
Ultraviolet ozone treatment added defects and oxygen groups as hooks. Seven minutes proved a sweet spot; beyond ten, the nanotube membrane degraded. Some introduced groups vanished during later heating, starving direct high-temperature deposition of nucleation sites. A two-step deposition sequence solved coverage. The coated tubes suit electronics and membranes needing insulated, robust carbon scaffolds. Process timing, minutes of exposure, is the difference between a functionalized network and a ruined one.
Catalog record
| CREATOR | Young Woo Kang, Haneul Kim, Inseo Lee, Yongkyung Kim, In-Sung Park, Jinho Ahn |
|---|---|
| YEAR | 2026 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 31 KB |
| VERSION | 1.0 |
| LICENSE | CC BY 4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |