Ultra-Precise Dispensing for Rapid and Flexible Through-Silicon Via Filling

Nina Szczotka, Shadi Nashashibi, Aleksandra Motyka, Sławomir Drozdek, Juerg Leuthold, Karol Malecha · 2026

Read Ultra-Precise Dispensing for Rapid and Flexible Through-Silicon Via Filling by Nina Szczotka, Shadi Nashashibi, Aleksandra Motyka, Sławomir Drozdek, Juerg Leuthold, Karol Malecha (2026) in the Tower of Babel, a free online library of public-domain works preserved in clean, searchable text. No sign-up. The full text is served as a plain-text file at a predictable URL, where text is present: https://antarctic-labs.com/tower-of-babel/pmc-13165430.txt.

Description

Szczotka and co-authors fill the tiny vertical tunnels of stacked chips with a precision dispenser instead of the usual elaborate metal coating steps. Through silicon vias link chip layers in 3D circuits, and their standard filling slows prototyping. Their 2026 study dispenses a silver nanoparticle paste into the holes and checks shape, fill quality, and electrical behavior.

The team filled vias through a 280 micrometer wafer with holes as narrow as twenty micrometers, a depth to width ratio up to fourteen to one. The filled vias conducted well. The authors say the additive route promises simpler, cheaper fabrication with more design freedom, a step toward dense high ratio vias made without the standard process chain.

Catalog record

CREATORNina Szczotka, Shadi Nashashibi, Aleksandra Motyka, Sławomir Drozdek, Juerg Leuthold, Karol Malecha
YEAR2026
COLLECTIONPAPERS
FORMATTXT
FILE SIZE29 KB
VERSION1.0
LICENSECC BY 4.0
RIGHTSCC BY
SOURCEEurope PMC

Source: https://europepmc.org/articles/PMC13165430

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