Fabrication of Silicon Monolithic Tubes with High-Aspect-Ratio Cavities Using Langmuir–Blodgett Colloidal Lithography and Bayesian-Optimized Continuous Plasma Etching
Artem Osipov, Alina Fumina, Ilya Belyanov, Anastasiya Speshilova, Ekaterina Endiiarova, Alexandr Gerdt · 2026
Read Fabrication of Silicon Monolithic Tubes with High-Aspect-Ratio Cavities Using Langmuir–Blodgett Colloidal Lithography and Bayesian-Optimized Continuous Plasma Etching by Artem Osipov, Alina Fumina, Ilya Belyanov, Anastasiya Speshilova, Ekaterina Endiiarova, Alexandr Gerdt (2026) in the Tower of Babel, a free online library of public-domain works preserved in clean, searchable text. No sign-up. The full text is served as a plain-text file at a predictable URL, where text is present: https://antarctic-labs.com/tower-of-babel/pmc-13129831.txt.
Description
Silicon tubes thinner than a hair, with hollows ten times deep as wide, are prized and painful to make. Artem Osipov and five co-authors show a cheaper route in 2026. A film of tiny beads, floated into order on water, stamps the pattern; a metal dusting follows, then a plasma that eats the silicon at room heat.
The eat step has many knobs, and hand tuning eats weeks. A Bayesian coach — a model that picks the next trial by what it has learned — tunes them instead. The result stands as an ordered field of upright tubes, each a single crystal piece with its deep hollow. Lab-on-chip and sensor work both want such tubes by the thousand.
Catalog record
| CREATOR | Artem Osipov, Alina Fumina, Ilya Belyanov, Anastasiya Speshilova, Ekaterina Endiiarova, Alexandr Gerdt |
|---|---|
| YEAR | 2026 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 71 KB |
| VERSION | 1.0 |
| LICENSE | CC BY 4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |