Study of the process-structure-property correlation in CVD-SiC coatings on graphite substrates
Yanli Huo, Shouwan Qin, Yufeng Chen, Taisheng Yang, Hailin Liu, Jiajia Ma, Bing Ai, Zetan Liu, Hailong Liang, Huaping Song · 2025
Read Study of the process-structure-property correlation in CVD-SiC coatings on graphite substrates by Yanli Huo, Shouwan Qin, Yufeng Chen, Taisheng Yang, Hailin Liu, Jiajia Ma, Bing Ai, Zetan Liu, Hailong Liang, Huaping Song (2025) in the Tower of Babel, a free online library of public-domain works preserved in clean, searchable text. No sign-up. The full text is served as a plain-text file at a predictable URL, where text is present: https://antarctic-labs.com/tower-of-babel/pmc-12859140.txt.
Description
Yanli Huo and nine co-authors wrote a 2025 study mapping how deposition settings shape silicon carbide coatings on graphite. These coatings protect the graphite parts inside machines that grow gallium nitride crystals. The coating's quality decides how well the part survives repeated high-temperature runs.
Using a standard precursor gas mix, the team varied temperature from 1100 to 1350 degrees, pressure, and hydrogen ratios. Microscopy, diffraction, and hardness testing were paired with airflow simulations. Growth switched kinetic regimes near 1180 degrees. Surface roughness grew with pressure, and a hydrogen ratio of ten gave the exact one-to-one silicon-carbon balance. The hardest coating reached 42.12 gigapascals. Optimized coatings survived full crystal-growth cycles with almost no surface change or interface damage. The results set practical guidelines for production.
Catalog record
| CREATOR | Yanli Huo, Shouwan Qin, Yufeng Chen, Taisheng Yang, Hailin Liu, Jiajia Ma, Bing Ai, Zetan Liu, Hailong Liang, Huaping Song |
|---|---|
| YEAR | 2025 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 34 KB |
| VERSION | 1.0 |
| LICENSE | CC BY 4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |