Fast micromirror selection and angle setting algorithm for freeform pupil in the illumination system for immersion lithography machines
Zhenxin Huang, Zenghui Yang, Aijun Zeng · 2025
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Description
Zhenxin Huang, Zenghui Yang, and Aijun Zeng gave a fast algorithm for the mirrors that shape light in chip-making machines in two thousand twenty-five. Immersion lithography prints very fine chip patterns. A grid of tiny mirrors steers the light, and their angles set energy balance and polarization of the beam.
For fine nodes, polarization affects the printed image, so both states must stay balanced. Their algorithm picks mirrors and sets angles to keep that balance. In simulations, imbalance fell to zero point zero eight percent in both states. The team also sped up the math, cutting compute time from six hundred seconds to a tenth of a second, which suits real engineering use.
Catalog record
| CREATOR | Zhenxin Huang, Zenghui Yang, Aijun Zeng |
|---|---|
| YEAR | 2025 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 53 KB |
| VERSION | 1.0 |
| LICENSE | CC BY 4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |