Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope
Huimin Tian, Zihan Zhang, Li Liu, Wenqiang Wei, Huiliang Cao · 2024
Read Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope by Huimin Tian, Zihan Zhang, Li Liu, Wenqiang Wei, Huiliang Cao (2024) in the Tower of Babel, a free online library of public-domain works preserved in clean, searchable text. No sign-up. The full text is served as a plain-text file at a predictable URL, where text is present: https://antarctic-labs.com/tower-of-babel/pmc-11679517.txt.
Description
Huimin Tian and co-authors design a tiny gyroscope that senses tilt out of its flat plane. Their 2024 paper builds the sensor with a chip method that joins electronic and moving parts on one base. Gyroscopes like this guide drones, vehicles, and other machines that must hold a steady heading. The team tunes the shape with a search method, then runs tests for vibration, response, and range before making the chip.
The finished chip is barely larger than a grain of rice. Model tests place its drive and sense tones very close, a sign of keen response. Lab checks of the made chip match the model closely, with tone error under two percent. Its still-state readings also match the set values. The design lays groundwork for joining sensor and circuits in one small package.
Catalog record
| CREATOR | Huimin Tian, Zihan Zhang, Li Liu, Wenqiang Wei, Huiliang Cao |
|---|---|
| YEAR | 2024 |
| COLLECTION | PAPERS |
| FORMAT | TXT |
| FILE SIZE | 38 KB |
| VERSION | 1.0 |
| LICENSE | CC BY 4.0 |
| RIGHTS | CC BY |
| SOURCE | Europe PMC |